Major Science and Technology Innovation Platform Special Conference on Major Scientific and Technological Achievements of Provincial Laboratory-Yongjiang Laboratory Thermal Field Material Innovation Center Appears at Zhejiang Science and Technology Innovation Conference
Dec 12,2023
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Major Science and Technology Platform Special Session Special Conference on Major Scientific and Technological Achievements of Provincial Laboratory--Yongjiang Laboratory Thermal Field Material Innovation Center Appears at Zhejiang Science and Technology Innovation Conference
Provincial LaboratorySpecial Conference on Major Scientific and Technological Achievements
“Application in semiconductor fieldUltra-high-purity, high-temperature and corrosion-resistant advanced coating
2023Year12Month11On the 15th, the opening ceremony of China Zhejiang Online Technology Market Week and the first Zhejiang Science and Technology Innovation Cooperation Conference were grandly held at the Future Science and Technology Academic Exchange Center in Yuhang District, Hangzhou. As an important part of this conference, the major science and technology innovation platform held a special conference on major scientific and technological achievements of provincial laboratories, attracting national high-tech enterprises, technology-based small and medium-sized enterprises, venture capital institutions, technology transfer institutions, industry associations and other professional institutions. Active participation of representatives.
At the press conference, Dr. He Shaolong, executive director and founder of the Thermal Field Materials Innovation Center of Yongjiang Laboratory, was invited to share the title“Ultra-high-purity, high-temperature and corrosion-resistant advanced coatings for semiconductor applications”The results of the report, caused widespread concern among the participants.
At this special conference on major scientific and technological achievements of the provincial laboratory, the results report of the Thermal Field Materials Center of Yongjiang Laboratory attracted attention, especially the technical application of ultra-high-purity, high-temperature and corrosion-resistant advanced coatings in the semiconductor field, which is the focus of the industry One.CVD(Chemical vapor deposition) technology plays a vital role in semiconductor manufacturing, but its complex system, many process parameters and abnormal sensitivity to changes in boundary conditions and other factors make it difficultCVDThe controllable preparation of coatings becomes a challenging problem.
The center focuses on scientific researchSiCandTaCThe ultra-high purity of the coating material provides stability in extreme high temperatures, while providing excellent resistance to corrosive gases. This provides an ideal solution for the extremely demanding material environment during the epitaxial and long crystal manufacturing processes of semiconductors, which will be quickly replaced by domestic products.
Hunan enrui professional productionchemical vapor depositionWelcome to inquire and visit the factory.
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