Essential Skills for the Use of Vapor Deposition Furnace

Vapor deposition furnace is mainly used for the sintering process of semiconductor components and power rectifier devices, which can be used for vacuum sintering, gas protection sintering and regular sintering. It is a novel technical equipment in semiconductor special equipment series, with novel design ideas, convenient operation and compact structure. One device can complete multiple process flows. It can also be used in other fields of vacuum heat treatment, vacuum brazing and other processes, so let's learn about the necessary skills for the use of vapor deposition furnaces!

One. Skills Required for Using Vapor Deposition Furnace

Under the condition of hydrogen protection after vacuum pumping, the vapor deposition furnace uses the principle of medium frequency induction heating to make the tungsten crucible located in the coil reach high temperature and conduct it to work through heat radiation. It is suitable for scientific research and military departments to form and sinter tungsten, molybdenum and its alloy powder. The site where the vapor deposition furnace is installed should meet the requirements of vacuum hygiene, the surrounding air is clean and dry, the ventilation conditions are good, and the workplace is not easy to raise dust.

Vapor deposition furnace daily use method:

1. Check whether all parts and components in the control cabinet are in good condition.

2. The control cabinet is installed and fixed on the corresponding basis.

3. Check the wiring diagram, refer to the circuit diagram, connect the external main circuit and control circuit, and reliably ground to ensure correct wiring.

4, check the electrical activity parts move freely, no card dead phenomenon.

5. The insulation resistance should not be less than 2 trillion ohms.

6. The valves of the vacuum furnace must be in the closed position.

7. Control the power switch to the off position.

8. The manual pressure regulating knob turns the head counterclockwise.

9. Place the alarm button in the open position.

10. When the plan is completed to connect the circulating cooling water of the equipment, it is recommended that the user add a layer of spare water (tap water is available) at the main inlet and outlet pipes of the equipment to prevent the sealing ring from burning due to circulating water failure or power failure.

The editor pays special attention to the following points when using the vapor deposition furnace.

1. The mold is generally prepared by the user, and the mold material is basically high-purity graphite, and its pressure limit is 40MPa. It is recommended that the user use it below 30MPa. Calculate the area of the upper and lower punches of the die before pressurizing and convert it into pressure. The specific formula is as follows: the system allows pressure (tons) = upper or lower punch area 30MPa

2. The thermocouple is of tungsten rhenium type, which becomes brittle after use and cannot be contacted. Replace immediately when damaged. Its model is W2 type.

3. Pay attention to the heat preservation of circulating water in winter. Otherwise prone to water pipe rupture.

4. After use, the furnace body should be kept in vacuum, the insulation layer in the furnace is easy to get damp, and the next vacuum will be faster.

5, the equipment is complex, it is recommended to use, special person is responsible for, strict pre-use training for beginners, there are after-use inspection, operation and use records and other equipment use regulations.

6. The hot pressing furnace can also be used as a vacuum sintering furnace. When used in a vacuum sintering furnace, please pay attention to placing the crucible in the furnace and closing the insulation board cover, and don't forget to close the small cover. Easy to burn the electric stove. 7. Clean the glass of the observation window before operation, clean the inner wall of the furnace, observe the water pressure, observe whether the graphite in the furnace is damaged, observe whether the instrument display is normal after starting up, and test whether the hydraulic system works normally.

8. After one year of use of the electric furnace, the instrument should be sent to the measurement department for calibration.

II. Emergency Method for Vapor Deposition Furnace

1. Abnormal cooling water

1. Confirm that the heating power is turned off.

2. If water leakage occurs outside the furnace and the amount of cooling water is abnormal, emergency measures should be taken as soon as possible. When the amount of water can be ensured, please continue to maintain the vacuum. If emergency measures cannot be taken, please keep it as it is and confirm that the equipment has cooled down.

3. When the cooling water is abnormal, the equipment is in a stopped state, and the standby cooling water is immediately connected.

4, high temperature (more than 200 is regarded as high temperature), the cooling water stop, such as emergency water delivery, water-cooled electrode, heat exchanger, vacuum chamber box and the pump may be damaged.

Stopping of Compressed Air in Vapor Deposition Furnace

1. When an abnormal compressed air alarm occurs, the equipment has been shut down and must go to the standby compression room to restart work as soon as possible.

2. Abnormal alarm of compressed air occurs in vacuum, and when it takes a long time to recover, stop the vacuum and stop the equipment.

Sudden power failure of vapor deposition furnace

1. When the power is cut off or the water is cut off, the standby cooling water should be connected immediately and the water source should be connected.

2, non-heating, heating, cooling, if it can be restored as soon as possible, restart the equipment, continuous operation for a long time, keep the equipment.

3. During the heating and cooling process, if it can be restored as soon as possible, restart the equipment. If it takes a long time, keep it as it is to cool the equipment naturally.

Vapor deposition furnace heating power off

1. When the water pressure is low and the water pressure is below 0.15MPa, the pressure gauge will alarm.

2. Ground fault.

3. Vacuum discharge, the connection between the water-cooled electrode terminal and the heater should be firmly connected and insulated from the reflective screen.

4. When the pressure in the furnace is 13.3-66.5Pa (the vacuum degree is easy to discharge). The cause of power failure and power drop may be discharge caused by dielectric damage.

Vapor deposition furnace to stop the supply of gas (argon or nitrogen)

1. Before starting to vacuum, if the inflation time is long or cannot be inflated, please check whether the gas pipeline is blocked.

2. There is no problem with the gas pipeline. Check the working conditions of the solenoid valve and the charging valve. For safety reasons, close all related equipment and check again.

3. When the filling of air into the vacuum chamber cannot be stopped, please close all gas systems including the air supply valve and piping when the pressure release valve such as the pressure release valve operates.

4. Check whether the inflation pipe is leaking, which may affect the product quality.

pressure deterioration of vapor deposition furnace

1. When the vacuum exhaust time is longer than usual, please stop the equipment for inspection. Depending on the structure in the vacuum chamber, the pressure may increase due to the influence of the exhaust.

2. Check for leakage by pressure rise test or helium gas to confirm the existence of leakage and venting effects. The above content is the necessary skills and daily emergency methods for the use of vacuum sintering furnace introduced by Xiaobian. In a vacuum and protective atmosphere, heating and sintering metal, ceramics and several insoluble metal intermediate compound powders to obtain materials with a certain density and certain mechanical properties, usually using two processes; namely, pressure sintering and pressureless sintering. Press sintering has the characteristics of high temperature, high vacuum degree and high hot pressing force.