What is the emergency plan for the daily use of high temperature sintering furnace?
Oct 18,2024
The high-temperature sintering furnace is mainly used for the sintering process of semiconductor devices and power rectifiers, which can be vacuum sintering, gas protection sintering and general sintering. The novel process equipment in the semiconductor special equipment series of high temperature sintering furnace has novel design concept, convenient operation and compact structure, and can complete a variety of processes on one equipment. It can also be used in other fields of vacuum heat treatment, vacuum brazing and other processes. What are the emergency plans for the daily use of high-temperature sintering furnaces? What are the precautions for using true high-temperature sintering furnaces?
One. Above coolant
1. Confirm that the heating power supply has stopped.
2. If there is water leakage outside the furnace and the cooling water is abnormal, emergency measures should be taken as soon as possible. If the quantity is guaranteed, please continue to maintain the vacuum. If emergency measures cannot be taken, please leave it as it is and ensure that the equipment is cooled.
3. When the cooling water is abnormal, the equipment is in a static state, please connect the emergency cooling water immediately.
4. If the cooling water is interrupted at a high temperature (above 200, which is considered high temperature), emergency water cannot be provided, and the water-cooled electrode, heat exchanger, vacuum chamber housing and pumps may be damaged.
II. Compressed air stop
1. When reporting abnormal compressed air, the equipment is in a static state and should go to the alternative compression chamber to resume work as soon as possible.
2. In vacuum, such as compressed air abnormal alarm, if the recovery takes a long time, terminate the vacuum and stop the equipment.
3 Power outage
1. When the power is cut off, the standby cooling water should be connected immediately and the water source should be connected.
2. In the case of non-heating, heating and cooling, if it can be restored as soon as possible, it will take a long time to restart the equipment and continue to run, please keep the equipment unchanged.
3. If it is heating and cooling, you can restart the equipment when it is restored as soon as possible. If it takes a long time, you can keep it unchanged and let the equipment cool down naturally.
4 Cut off heating power
1. Pressure gauge alarm when water pressure is lower than 0.15MPa.
2. Grounding error.
3. Vacuum discharge, water-cooled electrode joints and heater connections must be firmly connected and insulated from the reflective screen.
4. When the pressure in the furnace is 13.3-66.5Pa (this vacuum degree is easy to discharge). If the power supply fails, the cause of the power loss can be considered to be the discharge caused by the destruction of the medium.
Five. Expansion gas (argon or nitrogen) stop
1. Before the vacuum starts, please confirm whether the gas pipe is blocked when the gas is charged for a long time or cannot be charged.
2. If there is no problem with the gas pipeline, check the action of the solenoid valve and the gas expansion valve. For safety reasons, check all relevant equipment after stopping.
3. If the vacuum chamber cannot be inflated, when the relief valve action is the same as the relief valve action, all gas systems must be closed, including the gas supply valve and pipeline.
4. Check the gas expansion pipeline for air leakage. If so, it will affect the quality of the product.
VI. Deterioration of vacuum chamber pressure
1. If the vacuum exhaust time is longer than usual, stop the equipment for inspection. According to the state of the structure in the vacuum chamber, there is the influence of deflation and the pressure increase.
2. Confirm the effect of air leakage and bleed by pressure rise test or helium gas leak.
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