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Hunan Xirui Automation Equipment Co., Ltd

Specializing In The Design And Manufacturing Of

Ultra-high Temperature Industrial Electric Furnaces

Hunan Xirui Automation Equipment Co., Ltd
Enray Dynamic

Company News

Industry News

FAQ

High temperature graphitization furnace sent to Europe

High temperature graphitization furnace sent to Europe

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2023

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Recrystallization Silicon Carbide Sintering Furnace (Recrystallization Principle)

Recrystallization Silicon Carbide Sintering Furnace (Recrystallization Principle)

Recrystallization silicon carbide sintering furnace

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2023

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Semiconductor Components-SiC Coated Graphite Pedestal

Semiconductor Components-SiC Coated Graphite Pedestal

So, what exactly is this tray carrying the wafers? In the process of wafer manufacturing, some wafer substrates need to further construct epitaxial layers to facilitate the manufacture of devices. Typical LED light-emitting devices need to prepare GaAs epitaxial layers on silicon substrates. SiC epitaxial layers are grown on conductive SiC substrates for constructing devices such as SBD, MOSFET, etc. for power applications such as high voltage and high current. GaN epitaxial layers are constructed on semi-insulating SiC substrates, devices such as HEMTs are further constructed for RF applications such as communications. This process is inseparable from the CVD equipment. In CVD equipment, the substrate can not be directly placed on the metal or simply placed on a base for epitaxial deposition, because it involves gas flow (horizontal, vertical), temperature, pressure, fixed, off pollutants and other factors. Therefore, a pedestal is needed, and then the substrate is placed on the disk, and then epitaxial deposition is carried out on the substrate by CVD technology. This pedestal is a SiC coated graphite pedestal (also called a tray)

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2023

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Degreasing System of Vacuum Sintering Furnace

Degreasing System of Vacuum Sintering Furnace

Vacuum sintering furnaces, after careful cleaning of polymer adhesive residues in the hot zone, shall continuously and effectively process and filter the process gas containing adhesive to prevent adhesive accumulation on pipes, valves or pumps. Next, let me introduce the vacuum sintering furnace degreasing system.

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2023

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Tianjin Polytechnic University Equipment Acceptance

Tianjin Polytechnic University Equipment Acceptance

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2023

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Key Components of Vacuum Sintering Furnace

Key Components of Vacuum Sintering Furnace

The vacuum sintering furnace accumulates into surrounding parts (such as exhaust pipes, pumps, hot zones) to different degrees depending on the weight and residual polymer content of the sintered parts. Therefore, long downtime may occur for manual cleaning and daily maintenance.

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2023

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Chemical Vapor Deposition of Silicon Carbide Coated Graphite Disk

Chemical Vapor Deposition of Silicon Carbide Coated Graphite Disk

The research and application of GaN materials is the forefront and hot spot of global semiconductor research, and it is a new semiconductor material for the development of microelectronic devices and optoelectronic devices.

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2023

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Hunan Enrui Group Building Activity-Yang Patriotic Spirit Condenses Team Strength

Hunan Enrui Group Building Activity-Yang Patriotic Spirit Condenses Team Strength

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2023

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Hunan Xirui Automation Equipment Co., Ltd

24-hour service hotline:+86-400-0731-682 
Telephone:+86-0731-57803855
Fax: 0731-57803755
Technical Consultation: +86-19907326555 （Mr.Luo）

Business Contact: +86-13357327603 （Mr.Wu）

Mailbox:wyl@hnxirui.cn
Company QQ: 1033620781

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