Welcome to HUNAN XIRUI ANTOMATION EQUIPMENT CO.,LTD. official website.
湖南烯瑞
3DVR全景
Hunan Enrui automation equipment Co., Ltd.
24-hour service hotline: 400-0731-682
Telephone: 0731-57803955
The true: 0731-57803755
Business contact: Mr. Wu 13357327603
Technical consultation: Mr. Luo 19907326555
Mail box: wyl@hnxirui.cn
The company QQ: 1033620781
Links:
Hunan Hunan Enrui automation equipment Co., Ltd. all rights reserved. 湘ICP备18019693号
Chemical vapor deposition furnace
●Furnace Shell: All Carbon Steel/Inner Stainless Steel/All Stainless Steel
●Furnace gallbladder: soft carbon felt/soft graphite felt/hard composite felt
●Heater: Isostatic Graphite/Molded Three-High Graphite/Fine Graphite
●Process gas system: volume/mass flowmeter; manual valve/automatic valve; import/domestic
●Vacuum Pumps and Vacuum Meters - Imported/Domestic
●Human-machine interface: touch screen/industrial computer
●Electrical components: Zhengtai/Schneider/Siemens
|
Parameter\Model |
JR-CJL-Φ30×50 |
JR-CJL-Φ60×80 |
JR-CJL-Φ80×120 |
JR-CJL-Φ100×150 |
JR-CJL-Φ110×200 |
|
Volume（L） |
35 |
226 |
602 |
1177 |
1899 |
|
Maximum temperature（℃） |
1500 |
1500 |
1500 |
1500 |
1500 |
|
Workspace size D×H（mm） |
Φ300×500 |
Φ600×800 |
Φ800×1200 |
Φ1000×1500 |
Φ1100×2000 |
|
Temperature control |
Shimaden thermostat is used. |
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Heating mode |
Resistance heating |
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Vacuum system |
Antifouling Pump or Slide Valve Pump + Roots Pump |
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Sintering Environment |
Hydrocarbon gas, etc. |
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Rated power supply voltage(V) |
380 |
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Configure transformer according to design(V) |
Configuration of transformer in front of furnace according to design |
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Vacuum limit(Pa) |
6X10ˉ²（Vacuum cold state） |
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